Micro Electro Mechanical System Design


Author: James J. Allen

ISBN: 9780824758240

Copy Right Year:  2005

Pages:  496

Binding: Soft Cover

Publisher:  Taylor & Francis

SKU: 9780824758240 Category:


It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resources. It is a comprehensive, of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development.

Additional information

Weight .5 kg
Dimensions 23 × 16 × 2 cm

Table of Content


Fabrication Processes

MEMS Technologies

Scaling Issues for MEMS

Design Realization Tools for MEMS


Modeling and Design

MEMS Sensors and Actuators



Appendix A: Glossary

Appendix B: Prefixes

Appendix C: Micro-MKS Conversions

Appendix D: Physical Constants

Appendix E: Material Properties

Appendix F: Stiffness Coefficients of Frequently used MEMS Flexures

Appendix G: Common MEMS Cross-Section Properties

Appendix H


About The Author

James J Allen attended the University of Arkansas in Fayetteville, Arkansas, and received a B.S. degree in mechanical engineering in 1971. He spent 6 years in the U.S. Navy nuclear propulsion program and served aboard the fast attack submarines, USS Nautilus (SSN-571), USS Haddock (SSN-621), and USS Barb (SSN-596). After completion of his naval service, he returned to graduate school and received an M.S. in mechanical engineering from the University of Arkansas (1977) and a Ph.D. in Mechanical Engineering from Purdue University (1981)


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