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Introductory MEMS Fabrication and Applications

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Authors: Thomas M. Adams, Richard A. Layton

ISBN: 9788132206637

Copy Right Year: 2010

Pages: 464

Binding: Soft Cover

Publisher: Springer

SKU: 9788132206637 Category:

Description

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to micro fluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of micro fabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

Additional information

Weight .58 kg
Dimensions 23 × 15 × 2 cm

Table of Content

Preface

Part I: Fabrication

Introduction

The Substrate and Adding To It

Creating Patterns-Lithography

Creating Structures Micro machining

Solid Mechanics

Part II: Applications

Thinking About Modeling

MEMS Transducers

An Overview of How They Work

Piezoresistive Transducers

Capacitive Transducers

Piezoelectric Transducers

Thermal Transducers

Introduction to Micro fluidics

Micro fabrication Laboratories

Appendices

Glossary

Index

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