Description
In assembling the material for The Physics of Microfabrication a decade ago, it became clear that the field of building ultrasmall devices was in a state of rapid change. People not only were striving to build microdevices in fields other than microelectronic circuits, such as micro-optical, micromechanical, and microchemical devices, but, perhaps more important, also were striving toward achieving atomic tolerances (less than one nanometer). At the time we felt that if we wrote a book that was restricted to the physical basis of microfabrication, it should be able to cope with evolutionary changes in microfabrication processes and thereby not date too quickly.
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