The Physics of Micro / Nano Fabrication


Authors: Ivor Brodie, Julius J. Muray

ISBN: 9788184894134

Copy Right Year:  1992

Pages:  672

Binding: Soft Cover

Publisher:  Springer

SKU: 9788184894134 Categories: ,


In assembling the material for The Physics of Microfabrication a decade ago, it became clear that the field of building ultrasmall devices was in a state of rapid change. People not only were striving to build microdevices in fields other than microelectronic circuits, such as micro-optical, micromechanical, and microchemical devices, but, perhaps more important, also were striving toward achieving atomic tolerances (less than one nanometer). At the time we felt that if we wrote a book that was restricted to the physical basis of microfabrication, it should be able to cope with evolutionary changes in microfabrication processes and thereby not date too quickly.

Additional information

Weight 1.05 kg
Dimensions 24 × 18 × 3 cm

Table of Content

Preliminary Survey

Particle Beams: Sources, Optics, and Interactions

Plasmas: Physics and Chemistry

Layering Technologies

Pattern Generation


Limits to Nanofabrication




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