Description
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resources. It is a comprehensive, of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.
The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development.
Table of Content
Introduction
Fabrication Processes
MEMS Technologies
Scaling Issues for MEMS
Design Realization Tools for MEMS
Electromechanics
Modeling and Design
MEMS Sensors and Actuators
Packaging
Reliability
Appendix A: Glossary
Appendix B: Prefixes
Appendix C: Micro-MKS Conversions
Appendix D: Physical Constants
Appendix E: Material Properties
Appendix F: Stiffness Coefficients of Frequently used MEMS Flexures
Appendix G: Common MEMS Cross-Section Properties
Appendix H
Index
About The Author
James J Allen attended the University of Arkansas in Fayetteville, Arkansas, and received a B.S. degree in mechanical engineering in 1971. He spent 6 years in the U.S. Navy nuclear propulsion program and served aboard the fast attack submarines, USS Nautilus (SSN-571), USS Haddock (SSN-621), and USS Barb (SSN-596). After completion of his naval service, he returned to graduate school and received an M.S. in mechanical engineering from the University of Arkansas (1977) and a Ph.D. in Mechanical Engineering from Purdue University (1981)
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